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Pall Launches Nine New Products at Semicon West to Meet the Fast Changing Needs of the Semiconductor Industry for More Advanced Technologies



    The fast growing semiconductor market's move to narrower
    linewidths continues to drive the need for new and innovative
    filtration technologies that can achieve cleaner and purer fluids.
    Pall Corporation (NYSE: PLL), a global leader in microelectronics
    technologies, is introducing nine new products that boost process
    reliability, reproducibility and productivity and help the industry
    meet its changing needs. The new products for chemical, gas,
    photolithography and chemical mechanical polishing (CMP) applications
    are the latest additions to the Company's extensive portfolio for
    improving the economics of integrated circuit and display
    manufacturing. They will be showcased at Semicon West starting today.

    Chemical Applications

    Pall introduces two new membrane technology platforms to meet the
    increasing demands of single wafer and batch wet chemical processing.
    The UltiKleen(TM) Excellar ER Filter is the first 20 nanometer rated,
    all-fluoropolymer filter. It is a new generation of PTFE membrane
    design with improved surface kinetics for greater non-dewetting in
    aqueous and high viscosity chemicals. This filter brings a new level
    of retention to the industry by providing the ability to get beyond
    current manufacturing barriers to be able to remove the next level of
    contaminants. While the filter features improved retention and
    dewetting ability, there is no sacrifice to flow or service life.
    Pall is also launching the Ultipleat(R) SP DR Filter, a 30
    nanometer rated highly asymmetric membrane filter specifically
    developed for wet chemical surface preparation applications. The
    filter's unique asymmetric design allows for dual retention, and its
    polymer material enables the filter to operate at higher temperatures
    than other polymers. The filter also features improved chemical
    resistance, a hydrophilic surface and high flow rates.
    "UltiKleen(TM) Excellar ER and Ultipleat(R) SP DR Filters
    establish new performance benchmarks in the marketplace," says Steve
    Chisolm, President of Pall Microelectronics. "Both products are the
    result of close collaborative development between Pall's R&D team and
    industry-leading chip manufacturers and are process-proven. Customers
    have placed advanced orders in anticipation of their commercial
    release."
    According to the Semiconductor Industry Association, this year,
    chip sales will be approximately $250 billion, a 9.8 percent increase
    from 2005, as consumer demand for electronic devices continues
    unabated.

    Photolithography Applications

    Pall is also introducing its tightest photolithography filter
    ever. The new PE-Kleen Filter, a 10 nanometer rated filter is now
    available for a broad range of lithography chemistries including 193
    nm and 248 nm photoresists. It is the Company's latest addition to its
    high density, polyethylene membrane filter series, and offers
    exceptional defect-reducing capability while maintaining extremely low
    differential pressures during dispense or chemical processing.
    Pall's PE-Kleen Filters have been adopted in many critical
    lithography applications and allow customers to adopt even finer
    levels of filtration without any sacrifice in pressure drop. In
    point-of-use photoresist filtration, lithographers require filters
    that offer exceptional defect-reducing capabilities, while maintaining
    extremely low pressure during dispensing or chemical processing.
    "Over the past several years, Pall technologies have repeatedly
    pushed the limits of what's possible in lithography filtration," says
    Chisolm. "Our new 10 nm PE-Kleen Filter is a natural progression in
    our ongoing efforts to reduce defect densities and size in lithography
    processes, and confirms our belief that the physical limitations of
    lithography filtration have not yet been reached."
    Also for photolithography applications, the Company is introducing
    a Water for Immersion System for supplying ultra-clean water, up to 2
    L/min, for immersion lithography tools.

    Gas Purification/Filtration Technologies

    Pall is showcasing three new products from the Company's expanding
    family of gas purification and filtration technologies. These include

    -- PG Series Gaskleen(R) Purifier Assemblies and Manifolds for
    inert, flammable (silane, H(2)), corrosive and hydride gases
    capable of handling flow rates up to 1,000 slpm. This new
    series of products provides sub-parts per billion removal of
    molecular contaminants including moisture, oxygen, carbon
    dioxide, carbon monoxide, iron carbonyls and nickel carbonyls.

    -- Gaskleen(R) TM Sandwich Filter Assemblies (1 1/8" C-Seal) with
    a unique design that allows for easy integration of the filter
    assembly between the substrate and another component. The
    sandwich filter can reduce the overall length of a gas stick
    or permit the addition of another component to an existing gas
    stick.

    -- The AccuSep(R) SIL Nickel Filter Assembly, designed for use in
    ultra-high purity bulk gas applications. This assembly
    utilizes the Pall AccuSep nickel filter media, which provides
    removal of particles greater than 3nm with a 9-log efficiency.

    CMP Applications

    Additionally, Pall is expanding its range of tailored, depth-style
    filtration products for CMP with the introduction of two new products.
    The Profile(R) Sirius Filter, a 0.2 micron rated filter, is optimized
    for the retention of oversized, difficult to remove, rigid ceria
    particles. Its thicker, greater depth configuration provides increased
    performance up to high differential pressures. The StarKleen(TM) QD
    Capsule offers quick disconnect fittings for ease of installation
    close to point-of-dispense.
    "As we celebrate our 60th anniversary, we continue to help our
    customers achieve their manufacturing goals by delivering advanced
    engineered materials and systems solutions. Our singular focus on
    providing customers with filtration, separation, and purification
    solutions to make them more competitive is what sets Pall
    Microelectronics apart from others," adds Chisolm.
    Pall Microelectronics is the global leader in filtration,
    separations and purification technologies for the microelectronics
    industry. It supports the semiconductor, data storage, fiber optic,
    advance display and materials markets with a comprehensive suite of
    contamination control solutions for chemical, gas, water, chemical
    mechanical polishing (CMP) and photolithography processes.

    About Pall Corporation

    Pall Corporation is the global leader in the rapidly growing field
    of filtration, separations and purification. Pall's business is
    organized around two broad markets: Life Sciences and Industrial. The
    Company provides leading-edge products to meet the demanding needs of
    customers in biotechnology, pharmaceutical, transfusion medicine,
    semiconductor, water purification, aerospace and broad industrial
    markets. Total revenues for fiscal 2005 were $1.9 billion. The Company
    headquarters is in East Hills, New York with extensive operations
    throughout the world. Visit Pall at www.pall.com.

    Editor's Notes:

    -- These products are on display at Semicon West Booth #5656,
    Pall executives are also available for interviews

    -- Photos and additional information about the new products and
    Pall's capabilities for the semiconductor market can be found
    at http://www.pall.com/corporate_40410.asp