New Filter from Entegris Enables Advanced Copper Processes

The new Guardian(R) family of high-flow cartridge filters from
Entegris, Inc. (Nasdaq:ENTG) is designed to be non-reactive to a wide
range of plating additives and provide superior particle retention
capability and longer life. Guardian ECD filter cartridges are ideal
for high-purity electrochemical deposition processes, such as copper,
nickel, and gold plating.

"The Guardian ECD filters can enable today's leading edge
processes with reduced cost through its proprietary membrane
technology," said Chad Ruwe, Entegris vice president, Liquid
Microcontamination Control Business.

Guardian ECD filters use an optimized membrane pore structure and
feature proprietary PolySulfone (PES) membranes that will not react to
a variety of plating bath additives, thereby eliminating effects that
can compromise process quality. This unique hydrophilic membrane
reduces the occurrence of micro-bubble formation during wafer
processing, a significant contributor to wafer defects.

The Guardian ECD filter cartridge, which is available in
0.1um-0.05um pore sizes, are compatible with most housings, are quick
to install, and do not require any pre-wetting or flushing procedures
for quick startups. The high filter area and optimized flow design
also help extend service life and reduce downtime associated with
replacement. The filters offer a maximum operating temperature range
to 60 degrees C (140 degrees F).

ABOUT ENTEGRIS

Entegris (merged with Mykrolis in August 2005) is the global
leader in materials integrity management - delivering a wide range of
products for purifying, protecting and transporting critical materials
used in processing and manufacturing in semiconductor and other high
tech industries. Entegris is ISO 9001-certified and has manufacturing,
customer service or research facilities in the United States, China,
France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan.
Additional information can be found at www.entegris.com.